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FTIR Micro-spectroscopy
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Fourier Transform
Infrared (FTIR) spectroscopy is a fast, well established, and non-destructive
technique used to identify materials. It is particularly effective
with organics and polymeric materials. FTIR micro-spectroscopy applies
this technique to samples as small as 5 microns across.
Typical applications:
- Chemical analysis
of polymeric and other organic materials
- Analysis of
pharmaceuticals
- Structural analysis
of thin film dielectrics
- Quantitative
measurement of boron and phosphorus in BSG, PSG, BPSG
- Microcontamination
and particulate analysis, particularly organics
Equipment:
Nicolet 20SXB with
Spectratech IR plan microscope (10 µm resolution)
Spectratech Grazing Angle Objective 30X
Technical Description:
The FTIR spectrometer
measures the infrared absorption or reflectance spectrum to determine
vibrational frequencies, which provide information on chemical structure
and bonding. The spatial resolution of this technique is in the
order of 10µm, enabling it to determine the composition of
very small features on various substrates. The technique can also
study dopants in glasses and semiconductors.
Thin films over
metals or contamination on metallic surfaces can be identified with
the Grazing Angle Objective (GAO).
FTIR is complementary
to Raman spectroscopy and photoluminescence. For spectral searches,
MuAnalysis maintains an on-line library of infrared absorption spectra
containing more than 7000 entries, and custom entries are kept up
to date with technological trends.
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