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Optical Beam Induced Current (OBIC)

Optical beam induced current (OBIC) introduces photons into devices with a focused and scanned laser. The induced photocurrent image at various pins is captured. Differences in this image compared to a reference image can quickly pinpoint short or open circuits, ESD or over-stress damage, or device-level issues. Since OBIC introduces no charge into the circuit, it causes no damage. The technique can be performed from the back and from the front of devices.

OBIC images of a failed EPROM device, connecting to different pins.
OBIC images of a failed EPROM device, connecting to different pins.
OBIC images of a failed EPROM device, connecting to different pins.

A typical OBIC image consists of an overlay of a photo of the circuitry and a photocurrent map. Each is colorized differently for clarity.

OBIC is a powerful failure analysis technique since it localizes failures non-invasively and requires little in the way of sample preparation. Flip-chip devices, difficult to study by other means, can be studied through the die from the back side. It is an efficient and non-invasive optical analysis technique useful in detecting and localizing certain integrated circuit (IC) failures.

Typical applications

Detection of:

Equipment

LSM with specimen current amplifier

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